The TMCM-090 is a compact piezo motor driver module for high precision and highly dynamic piezo axis. It is specially designed for four phase piezo motors, like the PIEZO MOTOR "Piezo Legs". It can be combined with the driver-less modules TMCM-301 or TMCM-302 or with any step/direction controller. The TMCM-323 can be added for encoder feedback. Its small size makes it an optimum solution for integration on any user board. The board can be connected to a baseboard or customized electronics with a pin connector. Applications are optical and analytical instruments. Its high microstep resolution leads to a linear motor resolution of about 2nm per microstep. Applications * highly precise positioning for optical and analytical instruments * manufacturing equipment for semiconductor components * high density multi axis drive electronics * drives piezo legs’ 0,5µF capacity inputs with up to 3kHz step frequency * up to 2048 times microstepping using step / direction interface * up to 64 times microstepping using SPI control with direct access to DACs * step/direction control or SPI control * Motor outputs protected against short to GND * Overtemperature protection of driver stage