The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor. The SFM3100 measures flow ranges between -24 and +240 slm. It can also detect negative flow ranges, thereby recognizing errors or impeded flows in a reliable manner. At the same time, multiple gases are compensated with great precision. The flow rates and signal characteristics can be customized to meet customer-specific requirements. Like all Sensirion sensors, the analog mass flow sensor is based on the patented CMOSens® Technology, which combines the sensor and analysis electronics on a single microchip. The result is a highly stable and precise system for demanding and cost-sensitive applications. The SFM3100 is particularly suitable for inspiration applications as well as for mixing oxygen and air to a very precise degree.