MiCS-5914 Compact Air Quality Sensor

Amphenol SGX Sensortech MiCS Compact MOS Sensors are robust MEMS sensors for harsh environments in a small footprint (5x7x1.55mm). These sensors offer short lead-times and are suitable for air quality monitoring, gas leak detection, pollution detection among others. The silicon gas sensor structure of these MiCS sensors consists of an accurately micromachined diaphragm with an embedded heating resistor and the sensing layer on top. These air quality sensors feature less than 10s response time and operate within -30ºC to 85ºC temperature range.